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Additional Reading
(See related pages)

Click the link below to download the pdf file of "Materials for MEMS and Microsystems," a chapter from Tai-Ran Hsu's MEMS and Microsystems: Design and Manufacture.

ISBN 0-07-239391-2, © 2002, The McGraw-Hill Companies.

Bonus Chapter 7 (1157.0K)

The solutions for this bonus chapter are available for download by instructors by using the link below.

Hsu:MEMS and Microsystems: Design and Manufacture, Chapter 7 Solutions (71.0K)







Smith/HashemiOnline Learning Center

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