Click the link below to download the pdf file of "Materials for MEMS and Microsystems," a chapter from Tai-Ran Hsu's MEMS and Microsystems: Design and Manufacture.
ISBN 0-07-239391-2, © 2002, The McGraw-Hill Companies.
Bonus Chapter 7
(1157.0K)
The solutions for this bonus chapter are available for download by instructors by using the link below. Hsu:MEMS and Microsystems: Design and Manufacture, Chapter 7 Solutions
(71.0K)
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